Karl Suss MJB-3 Scanning IR Mask Aligner Return to Equipment Listing

Located inside the S.M.A.R.T. Laboratory clean room, the precision aligner is used for lithography pattering of photoresist for semiconductor devices. The aligner can accept 3 inch wafers and 4 inch masks. The MJB-3 IR aligner can be used to align wafer backside patterns to the front side.