S.M.A.R.T. Laboratory
Room 16 Ward - Vacuum processing lab

Most of the vacuum equipment is located within room 16 Ward Hall. Equipment located within room 16 includes the six-pocket e-beam evaporator, dual filament evaporator, ion mill, ICP-RIE, LPE furnace, ampoule stations, vacuum RTA, gas backfill station, and the plating system. See Laboratory Layout of Room 16 Ward

The vacuum processing equipment in Room 16.
The vacuum processing equipment in Room 16.

A view of the ampoule stations and the vacuum RTA in room 16 Ward Hall.
A view of the ampoule stations and the vacuum RTA in room 16 Ward Hall.

A view of room 16 showing the ICP-RIE in the foreground and the ion mill, dual filament evaporator, and the LPE furnace in the background.
A view of room 16 showing the ICP-RIE in the foreground and the ion mill, dual filament evaporator, and the LPE furnace in the background.

A view of room 16 Ward Hall showing the ICP-RIE in the foreground and the six-pocket e-beam evaporator in the background.
A view of room 16 Ward Hall showing the ICP-RIE in the foreground and the six-pocket e-beam evaporator in the background.

A view across room 16 Ward Hall from behind the LPE furnace.
A view across room 16 Ward Hall from behind the LPE furnace.

Aaron Thompson loads the VRTA with a GaAs wafer.
Aaron Thompson loads the VRTA with a GaAs wafer.



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Mechanical & Nuclear Engineering
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