Ward 15 - Clean Room and Chemistry Lab
The class 1000 clean room is housed within room 15 Ward Hall. Also within room 15 Ward are the wire saws, lapping and polishing systems, chemical hoods, scribers, and purification furnaces. The clean room houses the mask aligners, ovens, wet hoods, plasma asher, several microscopes, with port access to the high temperature furnace stacks. See Laboratory Layout of Room 15 Ward.
- Ward 15 - Clean Room and Chemistry Lab
- <p>The class 1000 clean room is housed within room 15 Ward Hall. Also within room 15 Ward are the wire saws, lapping and polishing systems, chemical hoods, scribers, and purification furnaces. The clean room houses the mask aligners, ovens, wet hoods, plasma asher, several microscopes, with port access to the high temperature furnace stacks. <em><a href="smart15">See Laboratory Layout of Room 15 Ward</a>.</em></p>
- Ward 15 - Clean Room and Chemistry Lab
- <p>The class 1000 clean room is housed within room 15 Ward Hall. Also within room 15 Ward are the wire saws, lapping and polishing systems, chemical hoods, scribers, and purification furnaces. The clean room houses the mask aligners, ovens, wet hoods, plasma asher, several microscopes, with port access to the high temperature furnace stacks. <em><a href="smart15">See Laboratory Layout of Room 15 Ward</a>.</em></p>
- Ward 15 - Clean Room and Chemistry Lab
- <p>The class 1000 clean room is housed within room 15 Ward Hall. Also within room 15 Ward are the wire saws, lapping and polishing systems, chemical hoods, scribers, and purification furnaces. The clean room houses the mask aligners, ovens, wet hoods, plasma asher, several microscopes, with port access to the high temperature furnace stacks. <em><a href="smart15">See Laboratory Layout of Room 15 Ward</a>.</em></p>
- Ward 15 - Clean Room and Chemistry Lab
- <p>The class 1000 clean room is housed within room 15 Ward Hall. Also within room 15 Ward are the wire saws, lapping and polishing systems, chemical hoods, scribers, and purification furnaces. The clean room houses the mask aligners, ovens, wet hoods, plasma asher, several microscopes, with port access to the high temperature furnace stacks. <em><a href="smart15">See Laboratory Layout of Room 15 Ward</a>.</em></p>
- Ward 15 - Clean Room and Chemistry Lab
- <p>The class 1000 clean room is housed within room 15 Ward Hall. Also within room 15 Ward are the wire saws, lapping and polishing systems, chemical hoods, scribers, and purification furnaces. The clean room houses the mask aligners, ovens, wet hoods, plasma asher, several microscopes, with port access to the high temperature furnace stacks. <em><a href="smart15">See Laboratory Layout of Room 15 Ward</a>.</em></p>
