Ward 16 - Vacuum Processing Lab
Most of the vacuum equipment is located within room 16 Ward Hall. Equipment located within room 16 includes the six-pocket e-beam evaporator, dual filament evaporator, ion mill, ICP-RIE, LPE furnace, ampoule stations, vacuum RTA, gas backfill station, and the plating system. See Laboratory Layout of Room 16 Ward.
- Ward 16 - Vacuum Processing Lab
- <p>Most of the vacuum equipment is located within room 16 Ward Hall. Equipment located within room 16 includes the six-pocket e-beam evaporator, dual filament evaporator, ion mill, ICP-RIE, LPE furnace, ampoule stations, vacuum RTA, gas backfill station, and the plating system. <a href="smart16"><em>See Laboratory Layout of Room 16 Ward.</em></a></p>
- Ward 16 - Vacuum Processing Lab
- <p>Most of the vacuum equipment is located within room 16 Ward Hall. Equipment located within room 16 includes the six-pocket e-beam evaporator, dual filament evaporator, ion mill, ICP-RIE, LPE furnace, ampoule stations, vacuum RTA, gas backfill station, and the plating system. <a href="smart16"><em>See Laboratory Layout of Room 16 Ward.</em></a></p>
- Ward 16 - Vacuum Processing Lab
- <p>Most of the vacuum equipment is located within room 16 Ward Hall. Equipment located within room 16 includes the six-pocket e-beam evaporator, dual filament evaporator, ion mill, ICP-RIE, LPE furnace, ampoule stations, vacuum RTA, gas backfill station, and the plating system. <a href="smart16"><em>See Laboratory Layout of Room 16 Ward.</em></a></p>
- Ward 16 - Vacuum Processing Lab
- <p>Most of the vacuum equipment is located within room 16 Ward Hall. Equipment located within room 16 includes the six-pocket e-beam evaporator, dual filament evaporator, ion mill, ICP-RIE, LPE furnace, ampoule stations, vacuum RTA, gas backfill station, and the plating system. <a href="smart16"><em>See Laboratory Layout of Room 16 Ward.</em></a></p>
- Ward 16 - Vacuum Processing Lab
- <p>Most of the vacuum equipment is located within room 16 Ward Hall. Equipment located within room 16 includes the six-pocket e-beam evaporator, dual filament evaporator, ion mill, ICP-RIE, LPE furnace, ampoule stations, vacuum RTA, gas backfill station, and the plating system. <a href="smart16"><em>See Laboratory Layout of Room 16 Ward.</em></a></p>
- Ward 16 - Vacuum Processing Lab
- <p>Most of the vacuum equipment is located within room 16 Ward Hall. Equipment located within room 16 includes the six-pocket e-beam evaporator, dual filament evaporator, ion mill, ICP-RIE, LPE furnace, ampoule stations, vacuum RTA, gas backfill station, and the plating system. <a href="smart16"><em>See Laboratory Layout of Room 16 Ward.</em></a></p>
